氯氣5.5N
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氯氣 Chlorine 5.5N |
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組分 Components |
規格 Specification |
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氯氣 Chlorine (Cl2) |
≥ 99.9995% |
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氫氣 Hydrogen(H2) |
≤0.1ppmv |
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氮氣 Nitrogen (N2) |
≤1 ppmv |
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氧氣 Oxygen (O2) |
≤ 0.5 ppmv |
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一氧化碳 Carbon Monoxide (CO) |
≤ 0.5 ppmv |
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二氧化碳 Carbon Dioxide (CO2) |
≤ 0.5 ppmv |
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總碳氫化合物Total Hydrocarbon (THC) |
≤ 0.5 ppmv |
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水Water (H2O) |
≤1 ppmv |
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Fe |
≤ 200ppbw |
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Cd |
≤ 2ppbw |
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Cu |
≤ 50ppbw |
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Na |
≤ 50ppbw |
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Zn |
≤ 20ppbw |
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Cr |
≤ 50ppbw |
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Ni |
≤ 50ppbw |
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P |
≤ 5ppbw |
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包裝規格 |
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氣瓶大小 Cylinder Size |
47L |
Y 罐 |
T罐 |
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充裝量 Fill Weight (kgs) |
50±0.5 |
500±3 |
1050±5 |
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尺寸 Cylinder Dimensions (cm) |
φ23x140 |
φ61×224 |
Φ80×224 |
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閥門 Valve Connection |
CGA660/DISS728/DIS634 |
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保質期 Shelf Life |
2 year |
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